The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

• Main Authors: Arutt, Charles N (Author), Alles, Michael L (Author), Liao, Wenjun (Author), Gong, Huiqi (Author), Davidson, Jim L (Author), Schrimpf, Ronald D (Author), Reed, Robert A (Author), Weller, Robert A (Author), Bolotin, Kirill (Author), Nicholl, Ryan (Author), Pham, Thang Toan (Author), Zettl, Alex (Author), Li, Mo (Author), Alphenaar, Bruce W (Author), Lin, Ji-Tzuoh (Author), Shurva, Pranoy Deb (Author), McNamara, Shamus (Author), Walsh, Kevin M (Author), Feng, Philip X-L (Author), Hutin, Louis (Author), Ernst, Thomas (Author), Homeijer, Brian D (Author), Polcawich, Ronald G (Author), Proie, Robert M (Author), Jones, Jacob L (Author), Glaser, Evan R (Author), Cress, Cory D (Author), Bassiri-Gharb, Nazanin (Author), Du, Qingyang (Contributor), Hu, Juejun (Contributor)
• Other Authors: Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
• Format: Article
• Language: English
• Published: IOP Publishing, 2017-12-08T14:52:06Z.
• Subjects: Article
• Online Access: Get fulltext

 The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS₂). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.