Electrostrictive microelectromechanical fibres and textiles

Microelectromechanical systems (MEMS) enable many modern-day technologies, including actuators, motion sensors, drug delivery systems, projection displays, etc. Currently, MEMS fabrication techniques are primarily based on silicon micromachining processes, resulting in rigid and low aspect ratio str...

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Bibliographic Details
Main Authors: Khudiyev, Tural (Contributor), Clayton, Jefferson Daniel (Contributor), Levy, Etgar Claude (Contributor), Chocat, Noemie (Contributor), Gumennik, Alexander (Contributor), Stolyarov, Alexander M. (Contributor), Joannopoulos, John (Contributor), Fink, Yoel (Contributor)
Other Authors: Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies (Contributor), Lincoln Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Department of Physics (Contributor), Massachusetts Institute of Technology. Research Laboratory of Electronics (Contributor)
Format: Article
Language:English
Published: Nature Publishing Group, 2017-12-13T16:48:09Z.
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Online Access:Get fulltext

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