Broad ion energy distributions in helicon wave-coupled helium plasma

Broad ion energy distributions in helicon wave-coupled helium plasma

Helium ion energy distributions were measured in helicon wave-coupled plasmas of the dynamics of ion implantation and sputtering of surface experiment using a retarding field energy analyzer. The shape of the energy distribution is a double-peak, characteristic of radiofrequency plasma potential mod...

Full description

Bibliographic Details
Main Authors: Woller, Kevin Benjamin (Contributor), Whyte, Dennis G (Contributor), Wright, Graham (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Nuclear Science and Engineering (Contributor), Massachusetts Institute of Technology. Plasma Science and Fusion Center (Contributor)
Format: Article
Language:English
Published: American Institute of Physics (AIP), 2018-07-25T18:47:58Z.
Subjects:
Article
Online Access:Get fulltext

Internet

Get fulltext

Similar Items