Directed self-assembly of a two-state block copolymer system
In this work, ladder-shaped block copolymer structures consisting of parallel bars, bends, and T-junctions are formed inside square confinement. We define binary states by the two degenerate alignment orientations, and study properties of the two-state system. We control the binary states by creatin...
Main Authors: | , , , , , , |
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Other Authors: | , , |
Format: | Article |
Language: | English |
Published: |
Springer Singapore,
2018-10-04T13:49:21Z.
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Subjects: | |
Online Access: | Get fulltext |
Summary: | In this work, ladder-shaped block copolymer structures consisting of parallel bars, bends, and T-junctions are formed inside square confinement. We define binary states by the two degenerate alignment orientations, and study properties of the two-state system. We control the binary states by creating openings around the confinement, changing the confinement geometry, or placing lithographic guiding patterns inside the confinement. Self-consistent field theory simulations show templating effect from the wall openings and reproduce the experimental results. We demonstrate scaling of a single binary state into a larger binary state array with individual binary state control. Keywords: Block copolymers, Self-assembly, Graphoepitaxy, Nanostructures, Lithographic confnement National Science Foundation (U.S.) (Award CMMI1234169) Taiwan Semiconductor Manufacturing Company |
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