|
|
|
|
| LEADER |
02250 am a22003613u 4500 |
| 001 |
118348 |
| 042 |
|
|
|a dc
|
| 100 |
1 |
0 |
|a Do, Hyung Wan
|e author
|
| 100 |
1 |
0 |
|a Massachusetts Institute of Technology. Center for Materials Science and Engineering
|e contributor
|
| 100 |
1 |
0 |
|a Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
|e contributor
|
| 100 |
1 |
0 |
|a Massachusetts Institute of Technology. Department of Materials Science and Engineering
|e contributor
|
| 100 |
1 |
0 |
|a Do, Hyung Wan
|e contributor
|
| 100 |
1 |
0 |
|a Choi, Hong Kyoon
|e contributor
|
| 100 |
1 |
0 |
|a Gadelrab, Karim Raafat
|e contributor
|
| 100 |
1 |
0 |
|a Chang, Jae-Byum
|e contributor
|
| 100 |
1 |
0 |
|a Alexander-Katz, Alfredo
|e contributor
|
| 100 |
1 |
0 |
|a Ross, Caroline A
|e contributor
|
| 100 |
1 |
0 |
|a Berggren, Karl K
|e contributor
|
| 700 |
1 |
0 |
|a Choi, Hong Kyoon
|e author
|
| 700 |
1 |
0 |
|a Gadelrab, Karim Raafat
|e author
|
| 700 |
1 |
0 |
|a Chang, Jae-Byum
|e author
|
| 700 |
1 |
0 |
|a Alexander-Katz, Alfredo
|e author
|
| 700 |
1 |
0 |
|a Ross, Caroline A
|e author
|
| 700 |
1 |
0 |
|a Berggren, Karl K
|e author
|
| 245 |
0 |
0 |
|a Directed self-assembly of a two-state block copolymer system
|
| 260 |
|
|
|b Springer Singapore,
|c 2018-10-04T13:49:21Z.
|
| 856 |
|
|
|z Get fulltext
|u http://hdl.handle.net/1721.1/118348
|
| 520 |
|
|
|a In this work, ladder-shaped block copolymer structures consisting of parallel bars, bends, and T-junctions are formed inside square confinement. We define binary states by the two degenerate alignment orientations, and study properties of the two-state system. We control the binary states by creating openings around the confinement, changing the confinement geometry, or placing lithographic guiding patterns inside the confinement. Self-consistent field theory simulations show templating effect from the wall openings and reproduce the experimental results. We demonstrate scaling of a single binary state into a larger binary state array with individual binary state control. Keywords: Block copolymers, Self-assembly, Graphoepitaxy, Nanostructures, Lithographic confnement
|
| 520 |
|
|
|a National Science Foundation (U.S.) (Award CMMI1234169)
|
| 520 |
|
|
|a Taiwan Semiconductor Manufacturing Company
|
| 546 |
|
|
|a en
|
| 655 |
7 |
|
|a Article
|
| 773 |
|
|
|t Nano Convergence
|
