Vertical Lamellae Formed by Two-Step Annealing of a Rod-Coil Liquid Crystalline Block Copolymer Thin Film
Silicon-containing block copolymer thin films with high interaction parameter and etch contrast are ideal candidates to generate robust nanotemplates for advanced nanofabrication, but they typically form in-plane oriented microdomains as a result of the dissimilar surface energies of the blocks. Her...
Main Authors: | Lee, Sangho (Author), Cheng, Li-Chen (Author), Ross, Caroline A. (Author) |
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Other Authors: | Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor) |
Format: | Article |
Language: | English |
Published: |
American Chemical Society (ACS),
2020-06-04T15:10:39Z.
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Subjects: | |
Online Access: | Get fulltext |
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