Development of low dark current SiGe-detector arrays for visible-NIR imaging sensor
SiGe based focal plane arrays offer a low cost alternative for developing visible- near-infrared focal plane arrays that will cover the spectral band from 0.4 to 1.6 microns. The attractive features of SiGe based foal plane arrays take advantage of silicon based technology that promises small featur...
Main Authors: | Sood, Ashok K. (Author), Richwine, Robert A. (Author), Puri, Yash R. (Author), DiLello, Nicole Ann (Author), Hoyt, Judy L. (Author), Akinwande, Tayo I. (Author), Dhar, Nibir (Author), Horn, Stuart (Author), Balcerak, Raymond S. (Author), Bramhall, Thomas G. (Author) |
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Other Authors: | Massachusetts Institute of Technology. Microsystems Technology Laboratories (Contributor) |
Format: | Article |
Language: | English |
Published: |
SPIE,
2021-12-20T20:05:31Z.
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Subjects: | |
Online Access: | Get fulltext |
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