Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow

A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As[subscript 2]S[subscript 3] chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved.

Bibliographic Details
Main Authors: Hu, Juejun (Contributor), Feng, Ning-Ning (Contributor), Agarwal, Anuradha Murthy (Contributor), Kimerling, Lionel C. (Contributor), Carlie, Nathan (Author), Petit, Laeticia (Author), Richardson, Kathleen (Author)
Other Authors: MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Microphotonics Center (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers, 2010-10-15T19:43:29Z.
Subjects:
Online Access:Get fulltext
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100 1 0 |a Hu, Juejun  |e author 
100 1 0 |a MIT Materials Research Laboratory  |e contributor 
100 1 0 |a Massachusetts Institute of Technology. Department of Materials Science and Engineering  |e contributor 
100 1 0 |a Massachusetts Institute of Technology. Microphotonics Center  |e contributor 
100 1 0 |a Kimerling, Lionel C.  |e contributor 
100 1 0 |a Hu, Juejun  |e contributor 
100 1 0 |a Feng, Ning-Ning  |e contributor 
100 1 0 |a Agarwal, Anuradha Murthy  |e contributor 
100 1 0 |a Kimerling, Lionel C.  |e contributor 
700 1 0 |a Feng, Ning-Ning  |e author 
700 1 0 |a Agarwal, Anuradha Murthy  |e author 
700 1 0 |a Kimerling, Lionel C.  |e author 
700 1 0 |a Carlie, Nathan  |e author 
700 1 0 |a Petit, Laeticia  |e author 
700 1 0 |a Richardson, Kathleen  |e author 
245 0 0 |a Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow 
260 |b Institute of Electrical and Electronics Engineers,   |c 2010-10-15T19:43:29Z. 
856 |z Get fulltext  |u http://hdl.handle.net/1721.1/59388 
520 |a A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As[subscript 2]S[subscript 3] chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved. 
546 |a en_US 
655 7 |a Article 
773 |t Proceedings of the Conference on Lasers and Electro-Optics, 2009 and 2009 Conference on Quantum electronics and Laser Science Conference