Optical loss reduction in HIC chalcogenide glass waveguides via thermal reflow
A rapid thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As[subscript 2]S[subscript 3] chalcogenide glass to reduce sidewall roughness and associated optical scattering loss. Up to 50% optical loss reduction after reflow treatment is achieved.
Main Authors: | Hu, Juejun (Contributor), Feng, Ning-Ning (Contributor), Agarwal, Anuradha Murthy (Contributor), Kimerling, Lionel C. (Contributor), Carlie, Nathan (Author), Petit, Laeticia (Author), Richardson, Kathleen (Author) |
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Other Authors: | MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor), Massachusetts Institute of Technology. Microphotonics Center (Contributor) |
Format: | Article |
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers,
2010-10-15T19:43:29Z.
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Subjects: | |
Online Access: | Get fulltext |
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