Evanescent Coupling Device Design for Waveguide-Integrated Group IV Photodetectors
We have fabricated vertical p-i-n silicon photodetectors that are monolithically integrated with compact silicon-oxynitride channel waveguides. By comparing the evanescent coupling from low index-contrast waveguides and compact, high index-contrast waveguides, the dependence of evanescent coupling b...
Main Authors: | Ahn, Donghwan (Contributor), Kimerling, Lionel C. (Contributor), Michel, Jurgen (Contributor) |
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Other Authors: | MIT Materials Research Laboratory (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor) |
Format: | Article |
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers,
2011-12-09T20:11:35Z.
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Subjects: | |
Online Access: | Get fulltext |
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