Development of chipscale chalcogenide glass based infrared chemical sensors
In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property...
Main Authors: | , , , , , , , |
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Other Authors: | , , |
Format: | Article |
Language: | English |
Published: |
Society of Photo-optical Instrumentation Engineers,
2012-07-25T19:36:29Z.
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Subjects: | |
Online Access: | Get fulltext |
Summary: | In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed. United States. Dept. of Energy (award number DE-SC52-06NA27341) |
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