Simulation and Analysis of Analog Circuit and PCM (Process Control Monitor) Test Structures in Circuit Design

Simulation and Analysis of Analog Circuit and PCM (Process Control Monitor) Test Structures in Circuit Design

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PCM test structures are commonly used to check the produced wafers from the standpoint of the technologist. In general these structures are managed inside the FAB and are focused on standard device properties. Hence their development and analysis is not driven by analog circuit blocks, which are sen...

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Bibliographic Details
Main Authors: Sobe, Udo, Rooch, Karl-Heinz, Mörtl, Dietmar
Other Authors: Hardt, Wolfram
Language:English
Published: Technische Universität Chemnitz 2007
Subjects:
info:eu-repo/classification/ddc/004
ddc:004
info:eu-repo/classification/ddc/500
ddc:500
Mikrosystemtechnik
Schaltungsentwurf
Analog circuit design
Process Control Monitor (PCM) methodology
Statistical Process Control
Wafer fabrication (FAB)
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200700919
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