Simulation and Analysis of Analog Circuit and PCM (Process Control Monitor) Test Structures in Circuit Design
PCM test structures are commonly used to check the produced wafers from the standpoint of the technologist. In general these structures are managed inside the FAB and are focused on standard device properties. Hence their development and analysis is not driven by analog circuit blocks, which are sen...
| Main Authors: | , , |
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| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Universitätsbibliothek Chemnitz
2007
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| Subjects: | |
| Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200700919 http://nbn-resolving.de/urn:nbn:de:swb:ch1-200700919 http://www.qucosa.de/fileadmin/data/qucosa/documents/5407/data/10_Rooch.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/5407/20070091.txt |
| Summary: | PCM test structures are commonly used to check the produced wafers from the standpoint of the technologist. In general
these structures are managed inside the FAB and are focused on standard device properties. Hence their development and
analysis is not driven by analog circuit blocks, which are sensitive or often used. Especially for DFM/Y of analog circuits
the correlation between design and technology has to be defined. The knowledge of electrical behavior of test structures
helps to improve the designer's sensitivity to technological questions.
This paper presents a method to bring the PCM methodology into the analog circuit design to improve design performance,
yield estimation and technology correlation. We show how both analog circuit and PCM blocks can be simulated and
analyzed in the design phase. |
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