Simulation and Analysis of Analog Circuit and PCM (Process Control Monitor) Test Structures in Circuit Design

Simulation and Analysis of Analog Circuit and PCM (Process Control Monitor) Test Structures in Circuit Design

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PCM test structures are commonly used to check the produced wafers from the standpoint of the technologist. In general these structures are managed inside the FAB and are focused on standard device properties. Hence their development and analysis is not driven by analog circuit blocks, which are sen...

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Bibliographic Details
Main Authors: Sobe, Udo, Rooch, Karl-Heinz, Mörtl, Dietmar
Other Authors: TU Chemnitz, Fakultät für Informatik
Format: Others
Language:English
Published: Universitätsbibliothek Chemnitz 2007
Subjects:
Analog circuit design
Process Control Monitor (PCM) methodology
Statistical Process Control
Wafer fabrication (FAB)
ddc:004
ddc:500
Mikrosystemtechnik
Schaltungsentwurf
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200700919
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200700919
http://www.qucosa.de/fileadmin/data/qucosa/documents/5407/data/10_Rooch.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/5407/20070091.txt

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