Mechanical interactions at the interface of chemical mechanical polishing

Mechanical interactions at the interface of chemical mechanical polishing

Bibliographic Details
Main Author: Shan, Lei
Published: Georgia Institute of Technology 2007
Subjects:
Grinding polishing
Tribology
Contact mechanics
Microelectronics Design and construction
Online Access:http://hdl.handle.net/1853/17774
id ndltd-GATECH-oai-smartech.gatech.edu-1853-17774
record_format oai_dc
spelling ndltd-GATECH-oai-smartech.gatech.edu-1853-177742013-12-15T03:36:22ZMechanical interactions at the interface of chemical mechanical polishingShan, LeiGrinding polishingTribologyContact mechanicsMicroelectronics Design and constructionGeorgia Institute of Technology2007-11-29T12:32:12Z2007-11-29T12:32:12Z2000-12Dissertationhttp://hdl.handle.net/1853/17774590700Access restricted to authorized Georgia Tech users only.
collection NDLTD
sources NDLTD
topic Grinding polishing
Tribology
Contact mechanics
Microelectronics Design and construction
spellingShingle Grinding polishing
Tribology
Contact mechanics
Microelectronics Design and construction
Shan, Lei
Mechanical interactions at the interface of chemical mechanical polishing
author Shan, Lei
author_facet Shan, Lei
author_sort Shan, Lei
title Mechanical interactions at the interface of chemical mechanical polishing
title_short Mechanical interactions at the interface of chemical mechanical polishing
title_full Mechanical interactions at the interface of chemical mechanical polishing
title_fullStr Mechanical interactions at the interface of chemical mechanical polishing
title_full_unstemmed Mechanical interactions at the interface of chemical mechanical polishing
title_sort mechanical interactions at the interface of chemical mechanical polishing
publisher Georgia Institute of Technology
publishDate 2007
url http://hdl.handle.net/1853/17774
work_keys_str_mv AT shanlei mechanicalinteractionsattheinterfaceofchemicalmechanicalpolishing
_version_ 1716618333073178624

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