Performance and evaluation of titanium nitride coatings

Bibliographic Details
Main Author:	Sollenberger, Neil Wilbur
Published:	Georgia Institute of Technology 2007
Subjects:	Sputtering (Physics) Titanium nitride
Online Access:	http://hdl.handle.net/1853/17799

id	ndltd-GATECH-oai-smartech.gatech.edu-1853-17799
record_format	oai_dc
spelling	ndltd-GATECH-oai-smartech.gatech.edu-1853-177992013-12-15T03:36:22ZPerformance and evaluation of titanium nitride coatingsSollenberger, Neil WilburSputtering (Physics)Titanium nitrideGeorgia Institute of Technology2007-11-29T12:33:37Z2007-11-29T12:33:37Z1978-12Thesishttp://hdl.handle.net/1853/17799136205Access restricted to authorized Georgia Tech users only.
collection	NDLTD
sources	NDLTD
topic	Sputtering (Physics) Titanium nitride
spellingShingle	Sputtering (Physics) Titanium nitride Sollenberger, Neil Wilbur Performance and evaluation of titanium nitride coatings
author	Sollenberger, Neil Wilbur
author_facet	Sollenberger, Neil Wilbur
author_sort	Sollenberger, Neil Wilbur
title	Performance and evaluation of titanium nitride coatings
title_short	Performance and evaluation of titanium nitride coatings
title_full	Performance and evaluation of titanium nitride coatings
title_fullStr	Performance and evaluation of titanium nitride coatings
title_full_unstemmed	Performance and evaluation of titanium nitride coatings
title_sort	performance and evaluation of titanium nitride coatings
publisher	Georgia Institute of Technology
publishDate	2007
url	http://hdl.handle.net/1853/17799
work_keys_str_mv	AT sollenbergerneilwilbur performanceandevaluationoftitaniumnitridecoatings
_version_	1716618340489756672

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