Generation of dicing damage in silicon wafers

Bibliographic Details
Main Author:	Ebbutt, Ralph
Published:	Georgia Institute of Technology 2007
Subjects:	Silicon Integrated circuits Wafer-scale integration
Online Access:	http://hdl.handle.net/1853/17878

id	ndltd-GATECH-oai-smartech.gatech.edu-1853-17878
record_format	oai_dc
spelling	ndltd-GATECH-oai-smartech.gatech.edu-1853-178782013-12-15T03:36:30ZGeneration of dicing damage in silicon wafersEbbutt, RalphSiliconIntegrated circuits Wafer-scale integrationGeorgia Institute of Technology2007-11-29T12:37:44Z2007-11-29T12:37:44Z1996-08Thesishttp://hdl.handle.net/1853/17878429415Access restricted to authorized Georgia Tech users only.
collection	NDLTD
sources	NDLTD
topic	Silicon Integrated circuits Wafer-scale integration
spellingShingle	Silicon Integrated circuits Wafer-scale integration Ebbutt, Ralph Generation of dicing damage in silicon wafers
author	Ebbutt, Ralph
author_facet	Ebbutt, Ralph
author_sort	Ebbutt, Ralph
title	Generation of dicing damage in silicon wafers
title_short	Generation of dicing damage in silicon wafers
title_full	Generation of dicing damage in silicon wafers
title_fullStr	Generation of dicing damage in silicon wafers
title_full_unstemmed	Generation of dicing damage in silicon wafers
title_sort	generation of dicing damage in silicon wafers
publisher	Georgia Institute of Technology
publishDate	2007
url	http://hdl.handle.net/1853/17878
work_keys_str_mv	AT ebbuttralph generationofdicingdamageinsiliconwafers
_version_	1716618364050210816

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