Patterning and cross-linking of functionalized polynorbornene polymers
A challenging application space exists for high-aspect-ratio, high-fidelity dielectrics in micro-electro-mechanical system (MEMS), microelectronic, and photonic applications. Photosensitive polymers are widely used in these fields because they are relatively easy to process and pattern, and have go...
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Georgia Institute of Technology
2012
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Online Access: | http://hdl.handle.net/1853/43722 |