Measuring Acid Generation Kinetics in Photoresist Films via Capacitance Techniques
In this thesis, a novel technique for measuring photoacid generation kinetics in chemically amplified photoresists was developed that utilizes capacitance measurements from interdigitated electrodes. In this technique, a chemically amplified photoresist is first coated onto the interdigitated elect...
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| Format: | Others |
| Language: | en_US |
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Georgia Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1853/7598 |