High resolution Fabry-Pérot interferometer - dynamic system modeling and nanopositioning control system design.
This work represents the research project to obtain the degree of Master of Sciences in Electrical Engineering, specializing in Systems Engineering, at the Escola Politécnica of the Universidade de São Paulo, in São Paulo, Brazil. The main objective of the project is to design the mirror nanopos...
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Language: | English |
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Universidade de São Paulo
2014
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Online Access: | http://www.teses.usp.br/teses/disponiveis/3/3139/tde-23122014-155735/ |