Precision machine design for the semiconductor equipment manufacturing industry
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. === Vita. === Includes bibliographical references (p. 293-301). === by Matthew James Van Doren. === Ph.D.
Main Author: | Van Doren, Matthew J., 1967- |
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Other Authors: | Alexander Slocum. |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2005
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/11496 |
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