The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990 === Includes bibliographical references. === by Michelle Tobi Schulberg. === Ph. D. === Ph. D. Massachusetts Institute of Technology, Department of Chemistry
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| Format: | Others |
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Massachusetts Institute of Technology
2021
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| Online Access: | https://hdl.handle.net/1721.1/138564 |