The reaction of molecular fluorine with silicon(100) : adsorption, desorption, and scattering dynamics
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Chemistry, 1990 === Includes bibliographical references. === by Michelle Tobi Schulberg. === Ph. D. === Ph. D. Massachusetts Institute of Technology, Department of Chemistry
Main Author: | Schulberg, Michelle Tobi. |
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Other Authors: | Massachusetts Institute of Technology. Department of Chemistry |
Format: | Others |
Published: |
Massachusetts Institute of Technology
2021
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Subjects: | |
Online Access: | https://hdl.handle.net/1721.1/138564 |
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