Diffractive optics for maskless lithography and imaging
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2003. === Includes bibliographical references (p. 229-233). === Semiconductor industry has primarily been driven by the capability of lithography to pattern smaller and smaller features. How...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2005
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| Online Access: | http://hdl.handle.net/1721.1/17963 |