Process development for a silicon planar resonant-tunneling field-effect transistor

Process development for a silicon planar resonant-tunneling field-effect transistor

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Includes bibliographical references (p. 67-69). === by Mike Chou. === M.S.

Bibliographic Details
Main Author:	Chou, Mike Chuan, 1969-
Other Authors:	Henry I. Smith, Dimitri A. Antoniadis.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2006
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/34047

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