Altman, A. H., & Duane Boning, J. A. B. (2007). Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP. Massachusetts Institute of Technology.
Chicago Style (17th ed.) CitationAltman, Arthur H., and Jeffrey A. Barks Duane Boning. Applying Run-by-run Process Control to Chemical-mechanical Planarization and Assessing Insertion Costs Versus Benefits of CMP. Massachusetts Institute of Technology, 2007.
MLA (8th ed.) CitationAltman, Arthur H., and Jeffrey A. Barks Duane Boning. Applying Run-by-run Process Control to Chemical-mechanical Planarization and Assessing Insertion Costs Versus Benefits of CMP. Massachusetts Institute of Technology, 2007.
Warning: These citations may not always be 100% accurate.