Strained SiGe-channel p-MOSFETs : impact of heterostructure design and process technology

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007. === Includes bibliographical references (p. 163-173). === Conventional Si CMOS intrinsic device performance has improved by 17% per year over the last 30 years through scaling of the g...

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Bibliographic Details
Main Author: Ní Chléirigh, Cáit
Other Authors: Judy L. Hoyt.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2008
Subjects:
Online Access:http://hdl.handle.net/1721.1/42236

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