Optimization of process variables in extrusion-spin coating

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 83-84). === by Sangjun Han. === M.S.

Bibliographic Details
Main Author: Han, Sangjun, 1972-
Other Authors: Jung-Hoon Chun.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2008
Subjects:
Online Access:http://hdl.handle.net/1721.1/43576
Description
Summary:Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 83-84). === by Sangjun Han. === M.S.