Optimization of process variables in extrusion-spin coating
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. === Includes bibliographical references (p. 83-84). === by Sangjun Han. === M.S.
Main Author: | Han, Sangjun, 1972- |
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Other Authors: | Jung-Hoon Chun. |
Format: | Others |
Language: | English |
Published: |
Massachusetts Institute of Technology
2008
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Subjects: | |
Online Access: | http://hdl.handle.net/1721.1/43576 |
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