Titanium nitride thin films by the electron shower process
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. === Includes bibliographical references (leaves 54-56). === by Patrick R. LeClair. === B.S.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2009
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| Online Access: | http://hdl.handle.net/1721.1/50025 |