The use of ionic liquid ion sources (ILIS) in FIB applications

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2009. === Includes bibliographical references (leaves 82-86). === A new monoenergetic, high-brightness ion source can be constructed using an arrangement similar to liquid metal ion sources (LMIS) by substit...

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Bibliographic Details
Main Author: Zorzos, Anthony Nicholas
Other Authors: Paulo Lozano.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2010
Subjects:
Online Access:http://hdl.handle.net/1721.1/51647