The use of ionic liquid ion sources (ILIS) in FIB applications
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2009. === Includes bibliographical references (leaves 82-86). === A new monoenergetic, high-brightness ion source can be constructed using an arrangement similar to liquid metal ion sources (LMIS) by substit...
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Format: | Others |
Language: | English |
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Massachusetts Institute of Technology
2010
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Online Access: | http://hdl.handle.net/1721.1/51647 |