Thermally actuated MEMS seal for vacuum applications
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011. === Cataloged from PDF version of thesis. === Includes bibliographical references (p. 142-145). === This thesis presents the design, fabrication and testing of a new, leak-free, permanently sealable MEMS val...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2012
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| Online Access: | http://hdl.handle.net/1721.1/68938 |