Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. === Includes bibliographical references (leaves 103-108). === by V.T. Srikar. === Ph.D.

Bibliographic Details
Main Author:	Srikar, V. T. (Vengallatore Thattai), 1972-
Other Authors:	Carl V. Thompson.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2014
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/85249

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record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-852492019-05-02T16:11:50Z Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits Srikar, V. T. (Vengallatore Thattai), 1972- Carl V. Thompson. Massachusetts Institute of Technology. Department of Materials Science and Engineering Materials Science and Engineering Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. Includes bibliographical references (leaves 103-108). by V.T. Srikar. Ph.D. 2014-03-06T15:27:55Z 2014-03-06T15:27:55Z 1999 1999 Thesis http://hdl.handle.net/1721.1/85249 42620931 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 108 leaves application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Materials Science and Engineering
spellingShingle	Materials Science and Engineering Srikar, V. T. (Vengallatore Thattai), 1972- Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
description	Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. === Includes bibliographical references (leaves 103-108). === by V.T. Srikar. === Ph.D.
author2	Carl V. Thompson.
author_facet	Carl V. Thompson. Srikar, V. T. (Vengallatore Thattai), 1972-
author	Srikar, V. T. (Vengallatore Thattai), 1972-
author_sort	Srikar, V. T. (Vengallatore Thattai), 1972-
title	Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
title_short	Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
title_full	Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
title_fullStr	Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
title_full_unstemmed	Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits
title_sort	electromigration behavior and reliability of bamboo al(cu) interconnects for integrated circuits
publisher	Massachusetts Institute of Technology
publishDate	2014
url	http://hdl.handle.net/1721.1/85249
work_keys_str_mv	AT srikarvtvengallatorethattai1972 electromigrationbehaviorandreliabilityofbambooalcuinterconnectsforintegratedcircuits
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Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits

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