Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. === Includes bibliographical references (p. 295-301). === by Laure C. Pruette. === Ph.D.

Bibliographic Details
Main Author:	Pruette, Laura C. (Laura Catherine), 1974-
Other Authors:	Rafael Reif.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2014
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/86668

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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-866682019-05-02T16:31:51Z Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction Pruette, Laura C. (Laura Catherine), 1974- Rafael Reif. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. Includes bibliographical references (p. 295-301). by Laure C. Pruette. Ph.D. 2014-05-07T16:56:54Z 2014-05-07T16:56:54Z 2001 2001 Thesis http://hdl.handle.net/1721.1/86668 49201932 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 301 p. application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science.
spellingShingle	Electrical Engineering and Computer Science. Pruette, Laura C. (Laura Catherine), 1974- Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
description	Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001. === Includes bibliographical references (p. 295-301). === by Laure C. Pruette. === Ph.D.
author2	Rafael Reif.
author_facet	Rafael Reif. Pruette, Laura C. (Laura Catherine), 1974-
author	Pruette, Laura C. (Laura Catherine), 1974-
author_sort	Pruette, Laura C. (Laura Catherine), 1974-
title	Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
title_short	Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
title_full	Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
title_fullStr	Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
title_full_unstemmed	Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
title_sort	oxide etching with nf₃ hydrocarbon chemistries for global warming emissions reduction
publisher	Massachusetts Institute of Technology
publishDate	2014
url	http://hdl.handle.net/1721.1/86668
work_keys_str_mv	AT pruettelauraclauracatherine1974 oxideetchingwithnf3hydrocarbonchemistriesforglobalwarmingemissionsreduction
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Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction

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