Ti/TiN スパッタリング薄膜の多層化につれての機械的特性の向上

Ti/TiN スパッタリング薄膜の多層化につれての機械的特性の向上

Bibliographic Details
Main Authors:	森, 敏彦, MORI, Toshihiko, 福田, 俊一, FUKUDA, Syun'ichi, 竹村, 嘉彦, TAKEMURA, Yoshihiko
Language:	ja
Published:	日本機械学会 2000
Subjects:	Coating Laminated Construction Composite Material Hardness Crystal Plasticity Multilayer Film Ti/TiN Magnetron Sputtering Silicone Substrate Energy Method
Online Access:	http://hdl.handle.net/2237/9035

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