Resealable, ultra-low leak micro valve using solder sealing

• Online Access: http://hdl.handle.net/2047/D20250826

MEMS valves typically actuate a flow-obstructing element to cover or uncover a gas flow path. This approach is prone to leakage, causing incomplete isolation across the valve. As a result, an exceptional open-to-closed flow rate ratio would be on the order of 10⁶. The limited open-to-closed flow rate ratios of conventional MEMS valves limit their utility for higher vacuum systems. One reason for the relatively high leakage in conventional MEMS valves is that the roughness of the valves contact surfaces prevents leak-free seals. Liquid-based sealing offers an opportunity for improved sealing.