Resealable, ultra-low leak micro valve using solder sealing
MEMS valves typically actuate a flow-obstructing element to cover or uncover a gas flow path. This approach is prone to leakage, causing incomplete isolation across the valve. As a result, an exceptional open-to-closed flow rate ratio would be on the order of 10<sup> 6</sup>. The limited...
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| Online Access: | http://hdl.handle.net/2047/D20250826 |