MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN

MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN

Bibliographic Details
Main Author: RONG, RONG
Language:English
Published: University of Cincinnati / OhioLINK 2007
Subjects:
Electron beam microcolumn
magnetic microdeflector
magnetic microstigmator
magnetic microlens
electron beam control
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390
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spelling ndltd-OhioLink-oai-etd.ohiolink.edu-ucin11773583902021-08-03T06:11:40Z MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN RONG, RONG Electron beam microcolumn magnetic microdeflector magnetic microstigmator magnetic microlens electron beam control This research studies an innovative micromagnetic method for electron beam control in the electron beam microcolumn. In order to realize the magnetic electron beam control in the electron beam microcolumn, three new micromachined magnetic devices have been designed, fabricated and characterized in this work. First, a magnetic microdeflector has been designed, fabricated, and characterized for the electron beam deflection/scanning in the EBMC. Experimental results showed that the developed magnetic microdeflector with a pole distances 0.5 mm linearly deflected the electron beam (280 eV) a distance of 0.21 mm with an electrical power of 3 mW. The realized magnetic microdeflector shows an excellent dynamic property with the reponse time of 25 ns for a step signal of 50 mA. The developed magnetic microdeflector has excellent capability of deflecting/scanning the electron beam in the electron beam microcolumn system with large scanning linearity and low power consumption. Second, a magnetic microstigmator has been designed, fabricated, and characterized for the electron beam astigmatism correction in the EBMC. Experimental results showed that the astigmatism of an electron beam (200 eV) was effectively corrected by the fabricated magnetic microstigmator with a low power consumption. Third, a magnetic microlens has been designed, simulated, fabricated, and tested for the electron beam focusing in an EBMC. The experimental results showed that, with a driving current of 150 mA, an electron beam of 1 keV was effectively focused by the developed magnetic microlens. Finally, the magnetic interference within the miniaturized magnetic electron beam control system consisting of the three developed magnetic devices has been modeled and simulated. The span range of the magnetic field distribution generated by each individual device has also been simulated and investigated. In summary, an innovative magnetic method for the electron beam control in the electron beam microcolumn has been introduced and fully demonstrated in this work. For the realization of the magnetic control method, three micromachined magnetic devices such as the magnetic microdeflector, the magnetic microstigmator, and the magnetic microlens have been successfully realized in this work for a miniaturized magnetic electron beam control system. 2007-07-03 English text University of Cincinnati / OhioLINK http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390 http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390 unrestricted This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.
collection NDLTD
language English
sources NDLTD
topic Electron beam microcolumn
magnetic microdeflector
magnetic microstigmator
magnetic microlens
electron beam control
spellingShingle Electron beam microcolumn
magnetic microdeflector
magnetic microstigmator
magnetic microlens
electron beam control
RONG, RONG
MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN
author RONG, RONG
author_facet RONG, RONG
author_sort RONG, RONG
title MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN
title_short MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN
title_full MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN
title_fullStr MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN
title_full_unstemmed MICROMACHINED MAGNETIC DEVICES FOR ELECTRON BEAM CONTROL IN THE ELECTRON BEAM MICROCOLUMN
title_sort micromachined magnetic devices for electron beam control in the electron beam microcolumn
publisher University of Cincinnati / OhioLINK
publishDate 2007
url http://rave.ohiolink.edu/etdc/view?acc_num=ucin1177358390
work_keys_str_mv AT rongrong micromachinedmagneticdevicesforelectronbeamcontrolintheelectronbeammicrocolumn
_version_ 1719432533762899968

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