Synthesis of Thin Films in Boron-Carbon-Nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition
Main Author: | |
---|---|
Language: | English |
Published: |
University of Cincinnati / OhioLINK
2010
|
Subjects: | |
Online Access: | http://rave.ohiolink.edu/etdc/view?acc_num=ucin1285688216 |
Description not available. |