Synthesis of Thin Films in Boron-Carbon-Nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition

Synthesis of Thin Films in Boron-Carbon-Nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition

Bibliographic Details
Main Author: Kukreja, Ratandeep
Language:English
Published: University of Cincinnati / OhioLINK 2010
Subjects:
Materials Science
Microwave Plasma CVD
Carbon Nitride Thin Films
Boron Nitride Thin Films
Low Temperature Diamond Thin Films
Nano-Seeding
Residual Stress
Online Access:http://rave.ohiolink.edu/etdc/view?acc_num=ucin1285688216

Internet

http://rave.ohiolink.edu/etdc/view?acc_num=ucin1285688216

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