Synthesis of Thin Films in Boron-Carbon-Nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition

Synthesis of Thin Films in Boron-Carbon-Nitrogen Ternary System by Microwave Plasma Enhanced Chemical Vapor Deposition

Bibliographic Details
Main Author:	Kukreja, Ratandeep
Language:	English
Published:	University of Cincinnati / OhioLINK 2010
Subjects:	Materials Science Microwave Plasma CVD Carbon Nitride Thin Films Boron Nitride Thin Films Low Temperature Diamond Thin Films Nano-Seeding Residual Stress
Online Access:	http://rave.ohiolink.edu/etdc/view?acc_num=ucin1285688216

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