A comparison of device isolations of VLSI fabrication

A comparison of device isolations of VLSI fabrication

碩士 === 國立成功大學 === 電機工程研究所 === 76 ===

Bibliographic Details
Main Authors:	ZHOU, ZHI-WEN, 周志文
Other Authors:	ZHANG, JUN-YAN
Format:	Others
Language:	zh-TW
Published:	1988
Online Access:	http://ndltd.ncl.edu.tw/handle/83480505022030388376

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