Stree relief of films on silicon substrate

Stree relief of films on silicon substrate

碩士 === 國立交通大學 === 光電(科學)研究所 === 77 ===

Bibliographic Details
Main Authors:	LIU, GUO-BIN, 劉國賓
Other Authors:	CHEN, MAO-JIE
Format:	Others
Language:	zh-TW
Published:	1988
Online Access:	http://ndltd.ncl.edu.tw/handle/60880041133928433368

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