Recrystallization of silicon films on SiO2 using CW CO2 laser annealing

碩士 === 國立交通大學 === 電子研究所 === 78 ===

Bibliographic Details
Main Authors:	CAI,MENG-JIN, 蔡孟錦
Other Authors:	ZHENG,HUANG-ZHONG
Format:	Others
Language:	zh-TW
Published:	1991
Online Access:	http://ndltd.ncl.edu.tw/handle/53799955734386690074

id	ndltd-TW-078NCTU2430150
record_format	oai_dc
spelling	ndltd-TW-078NCTU24301502015-10-13T15:21:05Z http://ndltd.ncl.edu.tw/handle/53799955734386690074 Recrystallization of silicon films on SiO2 using CW CO2 laser annealing 連續脈波二氧化碳雷射對氧化矽上矽薄膜再結晶技術之研究 CAI,MENG-JIN 蔡孟錦碩士國立交通大學電子研究所 78 ZHENG,HUANG-ZHONG 鄭晃忠 1991 學位論文 ; thesis 78 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 電子研究所 === 78 ===
author2	ZHENG,HUANG-ZHONG
author_facet	ZHENG,HUANG-ZHONG CAI,MENG-JIN 蔡孟錦
author	CAI,MENG-JIN 蔡孟錦
spellingShingle	CAI,MENG-JIN 蔡孟錦 Recrystallization of silicon films on SiO2 using CW CO2 laser annealing
author_sort	CAI,MENG-JIN
title	Recrystallization of silicon films on SiO2 using CW CO2 laser annealing
title_short	Recrystallization of silicon films on SiO2 using CW CO2 laser annealing
title_full	Recrystallization of silicon films on SiO2 using CW CO2 laser annealing
title_fullStr	Recrystallization of silicon films on SiO2 using CW CO2 laser annealing
title_full_unstemmed	Recrystallization of silicon films on SiO2 using CW CO2 laser annealing
title_sort	recrystallization of silicon films on sio2 using cw co2 laser annealing
publishDate	1991
url	http://ndltd.ncl.edu.tw/handle/53799955734386690074
work_keys_str_mv	AT caimengjin recrystallizationofsiliconfilmsonsio2usingcwco2laserannealing AT càimèngjǐn recrystallizationofsiliconfilmsonsio2usingcwco2laserannealing AT caimengjin liánxùmàibōèryǎnghuàtànléishèduìyǎnghuàxìshàngxìbáomózàijiéjīngjìshùzhīyánjiū AT càimèngjǐn liánxùmàibōèryǎnghuàtànléishèduìyǎnghuàxìshàngxìbáomózàijiéjīngjìshùzhīyánjiū
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Recrystallization of silicon films on SiO2 using CW CO2 laser annealing

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