Recrystallization of silicon films on SiO2 using CW CO2 laser annealing

Recrystallization of silicon films on SiO2 using CW CO2 laser annealing

碩士 === 國立交通大學 === 電子研究所 === 78 ===

Bibliographic Details
Main Authors:	CAI,MENG-JIN, 蔡孟錦
Other Authors:	ZHENG,HUANG-ZHONG
Format:	Others
Language:	zh-TW
Published:	1991
Online Access:	http://ndltd.ncl.edu.tw/handle/53799955734386690074

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