Interfacial reactions of molybdenum thin films on silcon

碩士 === 國立清華大學 === 材料科學工程研究所 === 78 ===

Bibliographic Details
Main Authors: XIE,MING-XUN, 謝銘勳
Other Authors: CHEN,LI-JUN
Format: Others
Language:zh-TW
Published: 1991
Online Access:http://ndltd.ncl.edu.tw/handle/42920464917601212287
id ndltd-TW-078NTHU2159085
record_format oai_dc
spelling ndltd-TW-078NTHU21590852016-07-27T04:14:24Z http://ndltd.ncl.edu.tw/handle/42920464917601212287 Interfacial reactions of molybdenum thin films on silcon 鉬與矽晶界面反應研究 XIE,MING-XUN 謝銘勳 碩士 國立清華大學 材料科學工程研究所 78 CHEN,LI-JUN 陳力俊 1991 學位論文 ; thesis 52 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 材料科學工程研究所 === 78 ===
author2 CHEN,LI-JUN
author_facet CHEN,LI-JUN
XIE,MING-XUN
謝銘勳
author XIE,MING-XUN
謝銘勳
spellingShingle XIE,MING-XUN
謝銘勳
Interfacial reactions of molybdenum thin films on silcon
author_sort XIE,MING-XUN
title Interfacial reactions of molybdenum thin films on silcon
title_short Interfacial reactions of molybdenum thin films on silcon
title_full Interfacial reactions of molybdenum thin films on silcon
title_fullStr Interfacial reactions of molybdenum thin films on silcon
title_full_unstemmed Interfacial reactions of molybdenum thin films on silcon
title_sort interfacial reactions of molybdenum thin films on silcon
publishDate 1991
url http://ndltd.ncl.edu.tw/handle/42920464917601212287
work_keys_str_mv AT xiemingxun interfacialreactionsofmolybdenumthinfilmsonsilcon
AT xièmíngxūn interfacialreactionsofmolybdenumthinfilmsonsilcon
AT xiemingxun mùyǔxìjīngjièmiànfǎnyīngyánjiū
AT xièmíngxūn mùyǔxìjīngjièmiànfǎnyīngyánjiū
_version_ 1718361842485559296