Reactive radio frequency sputtered TiC-film

Reactive radio frequency sputtered TiC-film

碩士 === 國立交通大學 === 電子物理學研究所 === 80 ===

Bibliographic Details
Main Authors: WU, KE-ZHUANG, 武可莊
Other Authors: ZENG, JUN-YUAN
Format: Others
Language:zh-TW
Published: 1992
Online Access:http://ndltd.ncl.edu.tw/handle/88200920453394001665
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spelling ndltd-TW-080NCTU24290282015-10-13T14:16:54Z http://ndltd.ncl.edu.tw/handle/88200920453394001665 Reactive radio frequency sputtered TiC-film 反應性交流高頻濺散法及碳化鈦鍍膜之研究 WU, KE-ZHUANG 武可莊 碩士 國立交通大學 電子物理學研究所 80 ZENG, JUN-YUAN ZHUANG, ZHEN-YI 曾俊元 莊振益 1992 學位論文 ; thesis 67 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 電子物理學研究所 === 80 ===
author2 ZENG, JUN-YUAN
author_facet ZENG, JUN-YUAN
WU, KE-ZHUANG
武可莊
author WU, KE-ZHUANG
武可莊
spellingShingle WU, KE-ZHUANG
武可莊
Reactive radio frequency sputtered TiC-film
author_sort WU, KE-ZHUANG
title Reactive radio frequency sputtered TiC-film
title_short Reactive radio frequency sputtered TiC-film
title_full Reactive radio frequency sputtered TiC-film
title_fullStr Reactive radio frequency sputtered TiC-film
title_full_unstemmed Reactive radio frequency sputtered TiC-film
title_sort reactive radio frequency sputtered tic-film
publishDate 1992
url http://ndltd.ncl.edu.tw/handle/88200920453394001665
work_keys_str_mv AT wukezhuang reactiveradiofrequencysputteredticfilm
AT wǔkězhuāng reactiveradiofrequencysputteredticfilm
AT wukezhuang fǎnyīngxìngjiāoliúgāopínjiànsànfǎjítànhuàtàidùmózhīyánjiū
AT wǔkězhuāng fǎnyīngxìngjiāoliúgāopínjiànsànfǎjítànhuàtàidùmózhīyánjiū
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