Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist

• Main Authors: LIN, BI-JUN, 林璧君
• Other Authors: LONG, WEN-AN
• Format: Others
• Language: zh-TW
• Published: 1992
• Online Access: http://ndltd.ncl.edu.tw/handle/04402273673926257693

碩士 === 國立交通大學 === 應用化學研究所 === 80 ===