Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist
碩士 === 國立交通大學 === 應用化學研究所 === 80 ===
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| Format: | Others |
| Language: | zh-TW |
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1992
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04402273673926257693 |
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ndltd-TW-080NCTU2500035 |
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oai_dc |
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ndltd-TW-080NCTU25000352015-10-13T14:20:24Z http://ndltd.ncl.edu.tw/handle/04402273673926257693 Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist 運用氫電漿前處理對離子植入負型阻劑之氧電漿清除的探討 LIN, BI-JUN 林璧君 碩士 國立交通大學 應用化學研究所 80 LONG, WEN-AN 龍文安 1992 學位論文 ; thesis 30 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
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| sources |
NDLTD |
| description |
碩士 === 國立交通大學 === 應用化學研究所 === 80 ===
|
| author2 |
LONG, WEN-AN |
| author_facet |
LONG, WEN-AN LIN, BI-JUN 林璧君 |
| author |
LIN, BI-JUN 林璧君 |
| spellingShingle |
LIN, BI-JUN 林璧君 Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| author_sort |
LIN, BI-JUN |
| title |
Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| title_short |
Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| title_full |
Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| title_fullStr |
Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| title_full_unstemmed |
Studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| title_sort |
studies on the hydrogen plasma pretreatment for the oxygen plasma stripping for ion implanted negative resist |
| publishDate |
1992 |
| url |
http://ndltd.ncl.edu.tw/handle/04402273673926257693 |
| work_keys_str_mv |
AT linbijun studiesonthehydrogenplasmapretreatmentfortheoxygenplasmastrippingforionimplantednegativeresist AT línbìjūn studiesonthehydrogenplasmapretreatmentfortheoxygenplasmastrippingforionimplantednegativeresist AT linbijun yùnyòngqīngdiànjiāngqiánchùlǐduìlízizhírùfùxíngzǔjìzhīyǎngdiànjiāngqīngchúdetàntǎo AT línbìjūn yùnyòngqīngdiànjiāngqiánchùlǐduìlízizhírùfùxíngzǔjìzhīyǎngdiànjiāngqīngchúdetàntǎo |
| _version_ |
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