Material properties and process technologies of platinum silicide relevant to VLSI applications

Material properties and process technologies of platinum silicide relevant to VLSI applications

碩士 === 國立交通大學 === 電子研究所 === 80 ===

Bibliographic Details
Main Authors: Cui, Bing-Yue, 崔秉鉞
Other Authors: Chen, Mao-Jie
Format: Others
Language:zh-TW
Published: 1992
Online Access:http://ndltd.ncl.edu.tw/handle/60420918202344728346
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spelling ndltd-TW-080NCTU44300032015-10-13T14:20:24Z http://ndltd.ncl.edu.tw/handle/60420918202344728346 Material properties and process technologies of platinum silicide relevant to VLSI applications 矽化鉑在積體電路應用上之材料性質與製程技術 Cui, Bing-Yue 崔秉鉞 碩士 國立交通大學 電子研究所 80 Chen, Mao-Jie 陳茂傑 1992 學位論文 ; thesis 394 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 電子研究所 === 80 ===
author2 Chen, Mao-Jie
author_facet Chen, Mao-Jie
Cui, Bing-Yue
崔秉鉞
author Cui, Bing-Yue
崔秉鉞
spellingShingle Cui, Bing-Yue
崔秉鉞
Material properties and process technologies of platinum silicide relevant to VLSI applications
author_sort Cui, Bing-Yue
title Material properties and process technologies of platinum silicide relevant to VLSI applications
title_short Material properties and process technologies of platinum silicide relevant to VLSI applications
title_full Material properties and process technologies of platinum silicide relevant to VLSI applications
title_fullStr Material properties and process technologies of platinum silicide relevant to VLSI applications
title_full_unstemmed Material properties and process technologies of platinum silicide relevant to VLSI applications
title_sort material properties and process technologies of platinum silicide relevant to vlsi applications
publishDate 1992
url http://ndltd.ncl.edu.tw/handle/60420918202344728346
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AT cuībǐngyuè xìhuàbózàijītǐdiànlùyīngyòngshàngzhīcáiliàoxìngzhìyǔzhìchéngjìshù
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